Hey Yezdi Dordi Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Granted Application number US09/916,365 Other versions US6881318B2 Google Patents Dynamic pulse plating for high aspect ratio featuresÄownload PDF Info Publication number US20030019755A1 US20030019755A1 US09/916,365 US91636501A US2003019755A1 US 20030019755 A1 US20030019755 A1 US 20030019755A1 US 91636501 A US91636501 A US 91636501A US 2003019755 A1 US2003019755 A1 US 2003019755A1 Authority US United States Prior art keywords pulse electrodeposition substrate metal time Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US20030019755A1 - Dynamic pulse plating for high aspect ratio features US20030019755A1 - Dynamic pulse plating for high aspect ratio features
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